Abstract: Nano structure material SiO 2, TiO 2 and ZrO 2 is prepared by sol gel method. There are many excellent properties such as high porosity (80%～99.8%) and inner surface ( 1 000 m 2/g ), small porosity (1～100 nm) and low density (10 kg/m 3) for nano structure material. The refraction index is 1.1～1.9. In the paper, the preparation of inertial confinement fusion target material by sol gel method is briefly reviewed and the effects of hydrolysis degree, precursor, catalyst on micro structure is discussed.