Abstract: The microspot target is one of the most important targets in the inertial confinement fusion(ICF) experiment, its fabrication technology is complicated. The target consists of a hydrocarbon(CH) film with a sharply defined spot(microspot) in the center seeded with another material. The target is fabricated using a three step procedure consisting of depositing the hydrocarbon film, defining the microspot, and depositing a seeded spot through a mask. The paper describes the production of CH film by the way of hot wire chemical vapor deposition, and focuses on the fabrication technology of the microspot target.