Abstract: Low density 6Li(H,D) micro targets are prepared by loose sintering 6LiH or 6LiD powder in a tiny gold cylinder and soaking for 30 min up to 430 ℃ at the rate of 10 ℃/h in argon. The dimension of the micro targets is as tiny as 0.6～1.0 mm for diameter and 1～ 2 mm for length. Densities of 6LiH and 6LiD without parylene C is (0.283±0.009) g/cm 3 and (0.369±0.009) g/cm 3, respectively while 6LiD targets with parylene C is only (0.301± 0.010 ) g/cm 3. The parylene C has no effect on purity, deuterium abundance and 6Li abundance of the sintered micro targets. It's effective to keep 6Li(H,D)purity by strict control of argon atmosphere.