Abstract: Ti films with different grain size are prepared by both magnet sputtering and ion plating. Microstructure and morphology of Ti film are analysed by X ray diffraction, TEM and SEM, respectively. In contrast with sputtered films, the optimization of grain orientation of ion plated Ti film is weaker and the cohesion between Ti film and Mo substrate is stronger. The films are denser and the optimization of grain orientation is weaker when substraites are heated to elevated temperature.