Abstract: The paper introduces the activated characteristic of the nano crystal titanium prepared by ion beam assistant deposition. The nano composite titanium films are treated under wider temperature range, and the crystal grain sizes as well as finite growing of Ti and TiH x are determined by the method of X ray diffraction(XRD) line broadened(Shelow formula).The XRD spectra confirm transform from the hydrogenated β Ti nano crystal into TiH x, and the atom ratio of TiH x characterized with XRD spectra is confirmed by determining the hydrogen/titanium atom ratio with hydrogen saturation technology.