Be靶制备技术研究

Preparation of Beryllium Foils

摘要: 介绍了Be靶制备的电阻加热法、滚轧法、静电振动法、离心沉淀法、聚集束溅射法等。结果显示 :电阻加热和滚轧制备自支撑Be靶的厚度范围分别为 2 0～ 970 μg/cm2 和 3 8～ 2 0 μm。

Abstract: The paper introduces the methods for making Be foils including rolling, resistant heating, focused ion beam sputtering, centrifugal precipitation and electricity vibration. Self supporting Be foils of 20～970 μg/cm 2 and 3.8～20 μm have been made by resistant heating and rolling, respectively.