高级检索

离子溅射对氚钛靶寿命的影响

Sputtering Effect on Life-time of Titanium Tritide Target

    摘要
  • 摘要: 应用TRIM程序模拟了离子在氚钛靶上的溅射产额。结果显示,O+、N+、C+和D+2等在氚钛靶上的溅射是导致氚钛靶寿命下降的重要因素。为了减小离子溅射对氚钛靶寿命的影响,束流入射角应小于45°。

     

    Abstract: Ion sputtering yields on TTi target are numerically calculated with TRIM program. The data of sputtering yields demonstrate that O+, N+, C+ and D+2 would bring about the decrease of lifetime of TTi target. In addition, the incident angle of ion beam should be less than 45° for decreasing the effect of ion sputtering.

     

    • HTML全文
    • 参考文献(8)
    • 相关文章
    • 施引文献
  • 资源附件(0)

/

返回文章
返回