静电场方法离子引出和收集特性分析

Analysis of Ion Extraction and Collecting by Electrostatic Field Method

  • 摘要: 采用二维电子非平衡模型对几种静电场离子引出方法进行模拟,分析了电子非平衡模型对离子引出过程中电位的影响。模拟了不同外加电压下几种静电场收集模型的离子引出收集特性、引出时间与屏蔽剥离的关系,以及碰撞和溅射效应。改进M型电极法的离子引出时间和引出收集率均比平行板电极法的好。

     

    Abstract: Several ion extraction methods were numerically simulated by using two dimensional electron non-equilibrium model. The influence of the model to potential was analyzed. Ion extraction and collecting character under different voltage, the relation of collecting time with shield stripping, and collision and sputtering effect were simulated. The results show that the improved M type electrode method is better than the parallel electrode method for both collecting time and collecting rate.

     

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