Abstract: High concentration helium, up to 0.19 (He-M ratio), was introduced into Ti films by magnetron sputtering method in a He/Ar complex atmosphere. The introduced helium distributes homogeneously in the films and mainly forms small helium bubbles. Helium thermodesorption experiments were carried out, and the results show that the thermodesorption properties of the introduced 4He are similar to those of radiogenic 3He in titanium tritides. Titanium alloy films containing helium were also prepared by this way and a comparison of thermodesorption properties between them and TiHe films was made.