Abstract: X-ray stress analysis is a nondestructive stress measurement method based on the principle of X-ray diffraction. Applied to beryllium, due to its lower density and little mass absorption coefficient, the X-ray penetration depth is rather large. Therefore, the total average stress in the surface layer of beryllium can be measured by X-ray method, but an uneven stress distribution in beryllium usually exists, and there would be some errors when the conventional X-ray stress analysis is adopted, also the stress along depth distribution can not be obtained. According to the difference of the X-ray penetration depth at every tilt during X-ray stress analysis, a new stress measurement method is set up in the paper, which can measure the stress along depth distribution in the surface layer of beryllium. The feasibility of the method has been validated using the cantilever beam loading experiment.