用饱和增益开关法压缩KrF准分子激光脉冲

Shortening of KrF Excimer Laser Pulses by Optical Gain Switching Method

摘要: 为提高激光作用于靶上的功率密度和耦合效率，需对目前的激光进行脉宽压缩。本工作采用饱和增益开关法，利用预放大器的放大特性对前端输出的非相干光进行了脉宽压缩，最后将脉宽为23 ns的种子光压缩到了12 ns，且可根据需要在5~20 ns内变化。

Abstract: In order to increase the intensity on target and the coupling efficiency, it is necessary to shorten the bandwidth of laser pulse. An optical gain switching method is adopted. As a result, the pulse width is shortened to 12 ns from 23 ns, and it can also be varied from 5 to 20 ns by simply changing the delay between the pulses.