Abstract: This article introduces the fabrication of the porous anodic alumina films which have ordeed pore arrangement by using a two-step anodization process. The films have a parallel channel structure which nanopore diameter can be 20-100 nm, and depth can reach 50 μm. The change of pore structure in the first and second anodization, moving the alumina layer, widening process was detailedly analysed. The effect of the parameters such as different electrolytes, anodization temperature and the voltage on the nanopore structure was studied. The surface and profile structure through FE-SEM (field emission scanning electron microscope), the element composition in tiny area of the anodic aluminum oxide (AAO) surface were studied. The result indicates the pore diameter of AAO which is anodized in oxalic acid solution is larger than which anodized in sulfuric acid solution. The anodization temperature and voltage can enlarge the nanopore diameter of AAO in a range.