Abstract: In this paper, experimental arrangements of measuring hydrogen isotope concentration and distribution in metal hydride with ion beam analysis methods were reported, and the advantage and disadvantage of different methods were analyzed too. Experiment results show that it can get abundant information and accurate value by these ways. It can get an accurate value since it’s the Rutherford cross-section, and the Mylar film used in the experiment is thin enough for H, D and T distinguishing each other while using ERD analysis method with 6.0 MeV O ion beam to proceed this work, but the disadvantage of this method is that the sample preparing is more difficult, and the analysis depth is lower. It could get the distribution information of H, D and T and the analysis depth is about 3.0 μm while using ERD analysis method with 7.4 MeV ⁴He ion beam, but the disadvantage is that the spectra of H, D and T overlap each other, which makes a big error in simulated calculation. If using PBS method with 3.0 MeV proton, the analysis depth is deeper, but it couldn’t get the H distribution information.