Abstract: Helium was introduced into Ti,TiZr alloy and TiMo alloy films during magnetron sputtering. After annealing at several conditions, helium bubbles were found in the films via observations by a JEOL transmission electron microscopy. The shapes of bubbles are polyhedrons, spheres and are most spherized polyhedrons. In the Ti film and the TiZr alloy film annealed at 800 ℃, there are a lot of regular hexahedron or octahedron bubbles, which are the same as the projections of equilibrium shape of their matrix crystal. With annealing temperature of 720 ℃, the bubbles in TiZr alloy annealed for 40 min are more round than those annealed for 130 min. When annealing for 30-60 min at 600-650 ℃, the bubbles in alloy are more round than those in pure Ti, and are prohibited more from growth. Besides annealing temperature, annealing time and alloy composition, grain boundaries and other bubbles also affect the bubble shape. Bubbles on triple boundary junctions are more round than those on normal boundaries. And the parts of two neighbor bubbles nearest each other are usually round, which leads move towards the other and finally enhance the bubble growth.