Fabrication Process of Multi-step Grating by Chemical Method
-
摘要: 采用溶胶凝胶法制备一种具有光敏性的ZrO2薄膜，通过紫外分光光度计对薄膜曝光前后的结构变化进行分析。结果表明，该薄膜具有良好的光敏性。采用紫外曝光结合图形转移工艺，制备了具有多台阶结构的复杂微细图形。测量结果表明，该结构为周期性三台阶结构，周期为210 μm，每个台阶的高度约为325 nm。Abstract: ZrO2 gel film was prepared from zirconium tetra-n-butoxide chemically modified with benzoylacetone by the sol-gel method. The obtained gel film shows an absorption band, characteristic of the π-π* transition of chelate ring, at around 336 nm. The absorption band associated with the chelate ring gradually decreases in intensity with UV-irradiation using a high pressure mercury lamp. It indicates that the chelate ring is dissociated by the UV-irradiation and that the gel film exhibits photosensitivity. Utilizing the photosensitivity, patterns (about 210 μm) with complex micro-structure could be fabricated by UV-irradiation through masks and leaching.
-
Keywords:
- micro-structure ,
- gel ,
- ZrO2 ,
- chelate ring ,
- photosensitive
-
-
[1] DAMMANN H. Color separation gratings[J]. Appl Opt, 1978, 17: 2 273-2 279. [2] 温圣林, 高福华, 郭永康，等. 用于惯性约束聚变系统中的色分离光栅近场衍射研究[J]. 中国激光，2005，32(8)：1 068-1 072.
WEN Shenglin, GAO Fuhua, GUO Yongkang，et al. Study on the near field diffraction of color separation gratings applied in ICF system[J]. Chinese Journal of Lasers, 2005, 32（8）: 1 068-1 072(in Chinese).[3] 袁静，魏晓峰，郭永康，等. 用于ICF 驱动器的色分离相位光栅的研究[J]. 激光技术，1999，23(3)：168-172.
YUAN Jing, WEI Xiaofeng, GUO Yongkang, et al. Study of color separation phase grating used for ICF drivers[J]. Laser Technology, 1999, 23（3）: 168-172(in Chinese).[4] 周斌，邱恒山，刘小林，等. 一步法紫外曝光制备TiO2光敏凝胶光栅的初步研究[J]. 强激光与粒子束，2004, 15(3): 305-308.
ZHOU Bin, QIU Hengshan, LIU Xiaolin, et al. Single-step fabrication of diffraction grating on TiO2 photosensitive gels film by direct UV irradiation[J]. High Power Laser and Particle Beams, 2004, 15(3): 305-308(in Chinese).[5] ZHOU Changhe, ZHANG Yanyan, XI Peng, et al. Symmetric color separation gratings[C] // Photonic Devices and Algorithms for Computing V（Proceedings of SPIE，5201）. San Diego CA: SPIE-International Society for Optical Engineering, 2003: 174-179. [6] 张问辉，段利华，胡建平，等. 色分离光栅激光诱导损伤特性实验研究[J]. 激光杂志，2005，26（2）: 15-17.
ZHANG Wenhui, DUAN Lihua, HU Jianping, et al. Laser-induced damage characteristic of color-separating gratings[J]. Laser Journal, 2005, 26(2): 15-17(in Chinese).[7] OHYA T, KABATA M, BAN T, et al. Effect of α-hydroxyketones as chelate ligands on dip-coating of zirconia thin films[J]. Journal of Sol-Gel Science and Technology, 2002, 25: 43-50. [8] TOHGE N, HASEGAWA M, NOMA N. Fabrication of two-dimensional gratings using photosensitive gel films and their characterization[J]. Journal of Sol-Gel Science and Technology, 2003, 26: 903-907. [9] MENDEZ-VIVAR J, BOSCH P, LARA V H. Experimental design of Si-Ti-Zr polymers containing hybrid Si species, spectroscopic study and thermal evolution[J]. Journal of Porous Materials, 2002, 9: 231-235.
计量
- 文章访问数: 728
- HTML全文浏览量: 0
- PDF下载量: 1496
下载:
