多台阶光栅结构的溶胶凝胶法制备工艺

Fabrication Process of Multi-step Grating by Chemical Method

摘要: 采用溶胶凝胶法制备一种具有光敏性的ZrO₂薄膜，通过紫外分光光度计对薄膜曝光前后的结构变化进行分析。结果表明，该薄膜具有良好的光敏性。采用紫外曝光结合图形转移工艺，制备了具有多台阶结构的复杂微细图形。测量结果表明，该结构为周期性三台阶结构，周期为210 μm，每个台阶的高度约为325 nm。

Abstract: ZrO² gel film was prepared from zirconium tetra-n-butoxide chemically modified with benzoylacetone by the sol-gel method. The obtained gel film shows an absorption band, characteristic of the π-π^* transition of chelate ring, at around 336 nm. The absorption band associated with the chelate ring gradually decreases in intensity with UV-irradiation using a high pressure mercury lamp. It indicates that the chelate ring is dissociated by the UV-irradiation and that the gel film exhibits photosensitivity. Utilizing the photosensitivity, patterns (about 210 μm) with complex micro-structure could be fabricated by UV-irradiation through masks and leaching.