Abstract: Based on the longitude-latitude trace method, a measurement system was developed for the complete surface measurement of inertial confinement fusion target. It was consisted of reconstructed atomic force microscope (AFM) combined with the precision rotating air-bearing and assistant transform shaft. In order to measure a hollow CH target with diameter of 0.34 mm, a complete coverage pattern was arranged to be latitude traces with 10 μm separation along nine longitude paths separated by 20° (maximal offset of the latitude is 20 μm). All of traces along the whole spherical surface were obtained experimentally. The sphere surface power spectrum versus mode number curve and the root mean square roughness (RMS) parameter were also calculated to evaluate the target characteristics.