自支撑薄膜剥离技术研究

Research on Stripping Techniques of Self-supporting Thin Films

  • 摘要: 自支撑薄膜的制备在核科学研究中至关重要。自支撑薄膜制备技术包括成膜技术和剥离技术。自支撑薄膜的成膜技术与普通有衬薄膜的相似,区别仅在于对薄膜剥离。本工作对自支撑薄膜的剥离技术进行了较为系统的研究,并在实践中比较分析各种脱膜方法及脱膜剂的优缺点。

     

    Abstract: he preparation of self-supporting film is important for the research of nuclear physics. Preparative techniques of self-supporting include depositing techniques and stripping techniques. Compared to supported thin films, it is critical to strip thin film from the substrate. The paper systematically studies stripping techniques of self-supporting thin film, analyzes and compares advantages and disadvantages of all kinds of stripping methods and releasing agents which have successfully applied to prepare self-supporting thin films.

     

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