Abstract: The Au/Gd multilayer films were prepared by magnetron sputtering. The effects of the technique parameters on the structure and properties of Au/Gd multilayer films were studied. The results show that the deposition rates of Au and Gd films decrease with increase of the sputtering pressure. At low pressure, the RMS roughnesses of Au and Gd films decrease with decrease of the sputtering pressure. The period structures of Au/Gd multilayer films are clearer at lower sputtering power. Based on the preparations of Au/Gd multilayer films, the Au/Gd hohlraum were fabricated. The effects of Au/Gd ratio on the mechanical properties of the Au/Gd hohlraum were investigated.