间歇跳动法制备微球α-C:H涂层

张宝玲; 何智兵; 吴卫东; 杨向东; 刘兴华

doi:10.7538/yzk.2009.43.09.0776

间歇跳动法制备微球α-C:H涂层

1.
中国工程物理研究院激光聚变研究中心,四川绵阳 621900
2.
四川大学,四川成都 610065

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出版历程
- 收稿日期: 1899-12-31
- 修回日期: 1899-12-31
- 刊出日期: 2009-09-19

Fabrication of α-C:H Coating on Microshell

1.
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
2.
Sichuan University, Chengdu 610065, China

摘要

摘要: 采用低压等离子体化学气相沉积方法，以反式二丁烯和氢气作为工作气体，利用间歇跳动模式，在直径为(280±50) μm的聚乙烯醇聚苯乙烯（PVAPS）双层球表面制备出了30 μm 厚αC:H涂层。利用原子力显微镜（AFM）、干涉显微镜和X光照相技术分别对涂层表面形貌、球形度和同心度进行表征，结果表明：当涂层厚度为30 μm时，表面均方根粗糙度低于30 nm；球形度与同心度均优于99%。利用热重分析和傅里叶变换红外光谱仪对其热稳定性和价键结构进行表征，结果表明，αC:H涂层主要存在sp3  C—H键，在280 ℃以下，结构成分非常稳定，达到450 ℃后，则完全石墨化。
- 惯性约束聚变靶 ,
- 微球 ,
- αC:H涂层 ,
- 粗糙度 ,
- 热稳定性
Abstract: Using trans2butene and hydrogen as the precursors, 30 μm thick αC:H coating was successfully coated on many (280±50) μm diameter PVAPS mandrels by lowpressure plasma chemical vapor deposition. The surface roughness was measured by atomic force microscopy, the result indicates that the RMS of roughness for 30 μm thick αC:H coating is less than 30 nm. The sphericity and concentricity which were measured by interfere microscope and Xradiography are all better than 99% relatively. Thermogravimetric analysis and Fourier transform infrared spectroscopy spectrum analysis were used to obtain the heat stability and structure of the coatings relatively, and the results show that the films mainly contain sp3 C—H bonds, and the αC:H coating is stability below 250 ℃, but it is turned into graphite when the temperature is 450 ℃.
- initial confinement fusion target ,
- microshell ,
- αC:H coating ,
- roughness ,
- heat stability

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参考文献(7)

[1]	1] 吴卫东，罗江山，黄勇，等. H2及H+对CxH1-x薄膜表面状态的影响[J]. 强激光与粒子束，2000，12(5)：593596. WU Weidong, LUO Jiangshan, HUANG Yong, et al. The effect of H2 and H+ on CxH1-x film surface state[J]. High Power Laser and Partical Beams, 2000, 12(5): 593596(in Chinese).
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间歇跳动法制备微球α-C:H涂层

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出版历程

Fabrication of α-C:H Coating on Microshell

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出版历程

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