气袋靶用聚酰亚胺薄膜的制备与性能研究

Fabrication and Properties of Polyimide Film for Gas-Filled Target

摘要: 由联苯四羧酸二酐和对苯二胺低温缩聚制备聚酰胺酸前驱体，经拉膜、高温酰亚胺化成功制备了气袋靶用超薄聚酰亚胺薄膜。利用傅里叶红外、白光干涉仪和荧光光谱仪对薄膜和气袋靶进行了表征。经测量，薄膜的平均粗糙度为4.44 nm、均方根粗糙度为5.34 nm，薄膜装配后形成的气袋靶可承受0.1 MPa的大气压。

Abstract: Precursor of polyamic acid was synthesized by 3, 3′, 4, 4′-biphenyltetracarboxylic dianhydride and 1, 4-diaminobenzene, and the corresponding ultrathin film was obtained by pulling process and thermal imidization. Then the obtained film and target were characterized by Fourier transfer infrared spectrometer (FT-IR), white light interference and X-ray fluorescence spectrometry. The film average roughness is 4.44 nm and root mean square roughness is 5.34 nm. Gas-filled targets made of thin film can afford 0.1 MPa pressure without leaking.