Abstract: The glow discharge polymer (GDP) films were fabricated by plasma polymerization technology at various parameters. The chemical structure of GDP films was characterized by Fourier transform infrared （FT-IR） spectrum. The hardness and modulus of GDP films were measured by nanoindentation. It is found that when work pressure and T₂B/H₂ flow ratio gradually decrease, SP³（CH₃）group decreases, while SP²（CH₂） and SP³（CH_1,2） group increase in the GDP films. The hardness and modulus of GDP films increase with decreasing pressure and T₂B/H₂ flow ratio. The hardness and modulus of GDP films are mainly influenced by such factors as SP³（CH₃） group, branched chain, double bond content and degree of cross-linking of carbon network in GDP films.