用中子活化分析镀膜厚度及其探测极限研究

Investigation on Feasibility and Detection Limits for Determination of Coating Film Thickness by Neutron Activation Analysis

摘要: 本工作提出用中子活化分析有基底的单层或多层镀膜厚度的方法。用Am-Be中子源对Au、Al、Cu等薄膜活化后，用HPGe探测器测量被活化薄膜放出的特征γ射线全能峰面积，并用蒙特卡罗方法模拟计算HPGe探测器对不同特征γ射线的探测效率，得到用反应堆中子源活化分析不同元素镀膜厚度的方法和探测极限。与目前广泛使用的X射线荧光方法相比，其分析灵敏度可提高几个量级。

Abstract: A method for the determination of coating film thickness by neutron activation was proposed in this paper. After Au, Al and Cu et al. films were activated with a Am-Be neutron source, the characteristic γ-rays emitted by the activated nuclides in the films were counted with a HPGe γ spectrometer. The detection limits of film thickness by ray counts and the Monte-Carlo simulated detection efficiencies. The possible detection limits are typically 4-5 orders of magnitude better than those by fluorescent X-ray method, which is currently widely used to determine coating film thickness.