Abstract: Radioisotope source excited X-ray fluorescence (XRF) has been widely used for determination trace elements in hair. The source excited XRF was once established in China Institute of Atomic Energy, it was used to analyze hair sample, the detection limit of Pb is about 10 μg. This project took the ever work as the basis, by amending the parameters the background signal intensity was reduced, the sensitivity was improved especially for Pb，the detection limits of Ca, Fe, Cu, Zn, Pb are 19, 1.2, 1.1, 0.62, 1.1 μg respectively. Taking V as inner-standard and sample mass is 0.5 g，instrument short-term stability relative standard deviation (RSD) is 0.38%, long-term stability RSD is 0.98%.