脉冲离子束轰击靶的热效应数值模拟
Simulation on Thermal Effect of Target Irradiated by Pulsed Ion Beams
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摘要: 分析了脉冲离子轰击靶膜和衬底的热效应，在能量较低的情形下，离子轰击处理为靶膜表面热流输入。采用有限元程序，对能量为600 keV、束流为12 mA的不同束斑半径的脉冲离子流轰击Cu基Ti靶的热传导进行了数值计算，得到了热传导清晰物理图象。Abstract: The thermal response of a film-substrate irradiated by pulsed ion beam is analyzed. In the case of relatively lower ion energy, the irradiating of ion beam could be equivalent to a heat flow conducting into the surface of the film. By using the finite element code, the thermal conduction of titanium films irradiated by pulsed ion beams with an energy of 600 keV, a current of 12 mA, and different beam sizes were simulated. The clear patterns of the thermal conduction were obtained.
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Keywords:
- pulsed ion beam ,
- target ,
- numerical simulation
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