钽在硫酸-甲醇体系中的电抛光工艺研究

Electropolishing of Tantalum in Sulfuric Acid-Methanol Electrolyte

  • 摘要: 为制备出高温高压状态方程(EOS)研究中所需的高质量钽膜,采用硫酸甲醇体系电解液对钽片进行电解抛光实验,测定了钽的阳极极化曲线,表征了钽样品抛光前后的表面形貌,分别研究了电解液配比、抛光电压、搅拌速率和电解液温度等因素对抛光效果的影响。抛光后钽表面均方根粗糙度和形貌测试结果表明,硫酸甲醇体系适用于钽的电解抛光,并初步确定了钽的电解抛光工艺参数,即硫酸与甲醇体积比为1∶7,电解电压为15~20 V,温度为-10~0 ℃,搅拌速率大于8 m/s。

     

    Abstract: In order to prepare some quality tantalum film for the study of high temperature and high pressure equation of state (EOS), the electropolishing of tantalum was carried out in sulfuric acid-methanol electrolyte. The test results of root mean square roughness and surface topography confirm that tantalum can be polished in this electrolyte. The effects of electrolyte composition, cell voltage, temperature and stirring rate on the surface roughness of electropolished tantalum were discussed. The results show that the optimal conditions are as follows: Sulfuric acid and methanol in volume ratio is 1∶7, cell voltage is 15-20 V, temperature is -100 ℃ and stirring rate is more than 8 m/s.

     

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