400 kV离子注入机光纤传输系统的改造

Update for Fiber Optic Transmission System of 400 kV Ion Implanter

  • 摘要: 在对400 kV离子注入机控制与测量信号传输系统的改造中,为解决在地电位与高电位之间信号的稳定传输问题,主要采用AD650模块代替RC4152模块进行V-F、F-V转换以简化外围电路,采用与1 mm塑料光纤相匹配的T1521、R2521模块进行电-光、光-电转换。电路输入输出端使用电压跟随器以提高阻抗匹配和抗干扰能力。实验结果表明,改造后的光纤传输系统电压信号线性度好,可稳定工作。

     

    Abstract: The signals of the ion source of 400 kV ion implanter are communicated between the ground potential and the high one through the fiber optic cables at frequency mode to seclude the high voltage. The fiber optic cable transmission system was updated because of its instability for the long time usage. In stead of the RC4152 chip, the AD650 chip was used to make the V-F (voltage-to-frequency) and the F-V conversion because of its simple outside circuit. The fiber optic cable of 1 mm diameter was used with T1521 and R2521 chips as its transmitter and receiver. The voltage followers were used in both input side and output side to enhance their impedance matching. The updated system has good linearity between VIN and VOUT, and it works well and stably.

     

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