Abstract: The SiC coated layer of HTGR fuel particles is the most critical layer in hindering the release of fission products. In this paper, SiC coated layer was prepared in the jetting fluidized bed by chemical vapor deposition method under different temperatures and the microstructure was studied using different characterization methods, including XRD, Raman and SEM analysis. It can be found that β-SiC without the doped C, Si and other impurities can be prepared in the experimental MTS concentration, in different temperatures from 1 520 ℃ to 1 600 ℃, and a slight change in density can be found. The microstructure analysis validates that the density change of the SiC coated layer is mainly due to the micro hole in the coated layer. The linear distribution of the micro hole is found, and all holes are located at the same deposition surface. It can be concluded that the formation of the micro hole in the coated layer is closely related to the particle fluidized state, which shall be focused on in the future.