铝台阶/氟化锂激光压缩复合靶的制备与测量

Fabrication and Measurement of Al-step/LiF Laser Compression Composite Target

摘要: 本文主要介绍用于激光加载材料非冲击压缩实验研究中的铝台阶/氟化锂复合靶的制备与相关参数的测量。铝台阶/氟化锂复合靶主要通过光学抛光减薄、离子束刻蚀台阶、表面减反膜制备、铝薄膜的精密轧制以及薄膜精密装配等加工技术与工艺流程制备。制备的铝台阶/氟化锂复合靶基本满足物理实验要求，获得了较好的实验结果。

Abstract: The fabrication and measurement of Al-step/LiF composite targets were presented, which are usually used in laser drive shockless compression experiments. Al-step/LiF composite targets were prepared with the processes including optical polishing, ion beam etching, antireflection film coating, precision rolling of the Al films and precise micro-assembly. The prepared Al-step/LiF composite targets met the demand of experiments, and obtained very good experimental results.