860 A溅射负离子源电离器及电源的改进

Improvement of Ionizer and Power Supply of 860 A Sputtering Negative Ion Source

  • 摘要: 本文采用直径为2.5 mm的不锈钢铠装热丝研制了透射型表面电离器,并对离子源电源进行了改进。用连续可调直流开关电源代替原装交流电源作为电离器电源,用置于地电位的0~-20 kV电源代替原悬浮于-20 kV引出电压上的10 kV浸没透镜电源。给出了改进后GIC4117 2×1.7 MV串列加速器前法拉第杯H-流强随电离器加热电流的变化曲线。

     

    Abstract: A transmission surface type ionizer was developed with a 2.5 mm stainless steel sheath core heating cable, and the ion source power supply was also improved. A continuous adjustable DC switching power supply was employed instead of the original AC power supply as the ionizer power supply, and a 0-20 kV DC power supply at the ground potential as the power of the immersion lens replaced the original 10 kV DC power supply suspended in -20 kV. The variation of the beam intensity of H- in the front Faraday cup of the GIC4117 2×1.7 MV tandetron with the ionizer heating current was also shown.

     

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