Abstract: In order to study the difference of the nonlinear evolution of Rayleigh-Taylor instability under the same driven condition while the initial perturbation amplitude was different. The aluminum alloy templates with different perturbation amplitudes at two sides of its surface were fabricated via single-point diamond turning technology. Then the perturbation pattern was transferred from the template to the CH film via spin coating process, and the dual-mode CH planar perturbation target was prepared. Parameters of the aluminum alloy template and the CH target, such as the perturbation period and perturbation amplitude were characterized by QC-5000 tool microscope, alpha-step 500 surface profiler and NT1100 white light interferometer. Results show that both the template and the CH planar perturbation target have different perturbation patterns at two sides of their surfaces. The perturbation periods at two sides are both 54 μm, while the perturbation amplitude is 4.8 μm and 1.9 μm at the left and right sides, respectively. The equilibrium position of the perturbation pattern at two sides is in the same horizontal plane. Parameters of the template and the target are consistent with the designed value, the perturbation pattern is transferred from the aluminum alloy template to the CH film successfully, and the dual-mode CH planar perturbation target which meets the requirements of the Rayleigh-Taylor instability experiment was fabricated.