Abstract: The arc power supply is one of the most important equipments for neutral beam injection system. The stability of arc discharge and the quality of ion beam extraction were determined by its performance. For improving stability of the arc discharge, reducing the power network capacity and decreasing impulse on power network, the topology of the arc power supply applied the structure of DC/DC converter based on technology of super capacitor energy storage and switching power supply. Several IGBT power modules are operated in parallel, and it can improve the arc power supply’s operating frequency and dynamic response. A filter circuit and a current fast transferring circuit were designed based on a detailed analysis on working process of the arc power supply. According to the requirements and parameters of the arc power supply, and the current response of RL first order circuit, the minimum filter inductances were accurately calculated. Finally, using the model and Matlab, the performance of the arc power supply was simulated and verified, and it meets the design requirement.