Abstract: The pinhole imaging technique is widely used in the measurement of X-ray spot of rod-pinch diode. The X-ray CCD camera, which was composed of film, fiber optic taper and CCD camera, was employed to replace the imaging system based on scintillator, lens and CCD camera in the diagnosis of X-ray spot. The resolution of the X-ray CCD camera was studied. The resolution is restricted by the film and is 5 lp/mm in the test with Pb resolution chart. The frequency is 1.5 lp/mm when the MTF is 0.5 in the test with edge image. The resolution tests indicate that the X-ray CCD camera can meet the requirement of the diagnosis of X-ray spot whose scale is about 1.5 mm when the pinhole imaging magnification is 0.5. At last, the image of X-ray spot was gained and the restoration was implemented in the diagnosis of X-ray spot of rod-pinch diode.