激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的研制

Fabrication of Al/LiF Composite Dual-step Target Used in Quasi-isentropic Compression Experiment by Laser Loading

摘要: 本文提出了一种激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的加工技术。采用金刚石车削在1.5 mm厚的氟化锂晶体表面加工两个10 μm高度的台阶，然后利用电子束蒸发在氟化锂台阶面镀厚度为几十μm的高致密纯铝膜，再通过金刚石车削工艺将镀铝面车削成平面，最后在氟化锂晶体另一面蒸镀剩余反射率低于1%的增透膜，最终获得高质量的铝/氟化锂复合双台阶靶。采用NT1100白光干涉仪、电子比重计、电子能谱、X射线衍射仪、扫描电镜等设备对靶参数进行测量，研究各工艺对靶参数的影响。

Abstract: The fabrication technique for Al/LiF composite dual-step target used in quasi-isentropic compression experiment was described. The two 10 μm high steps were processed by diamond turning technology in the surface of the 1.5 mm LiF crystal. The high-density Al film with dozens of micron thickness was coated by electron beam evaporation, and turned into a flat aluminized surface through the diamond turning process. A high-quality Al/LiF composite dualstep target was eventually completed with an evaporated antireflection film (the residual reflectivity was less than 1%) on the other side of the LiF crystal. The target parameters were measured by NT1100 white light interferometer, electron densimeter, electron spectroscopy, XRD and SEM for sensitivity analysis.