激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的研制

叶君建; 谢志勇; 张志友; 陆驰中; 吴永刚; 董佳钦; 舒桦; 黄秀光; 傅思祖

doi:10.7538/yzk.2016.50.05.0927

激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的研制

1.
上海激光等离子体研究所,上海201800
2.
四川大学物理系,四川成都610044
3.
上海现代超先进精密制造中心有限公司,上海200433
4.
同济大学物理科学与工程学院,上海200092

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- 刊出日期: 2016-05-19

Fabrication of Al/LiF Composite Dual-step Target Used in Quasi-isentropic Compression Experiment by Laser Loading

1.
Shanghai Institute of Laser Plasma, Shanghai 201800, China
2.
Department of Physics, Sichuan University, Chengdu 610044, China
3.
Shanghai Modern Advanced Ultra Precision Manufacturing Center Co., Ltd., Shanghai 200433, China
4.
School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

摘要

摘要: 本文提出了一种激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的加工技术。采用金刚石车削在1.5 mm厚的氟化锂晶体表面加工两个10 μm高度的台阶，然后利用电子束蒸发在氟化锂台阶面镀厚度为几十μm的高致密纯铝膜，再通过金刚石车削工艺将镀铝面车削成平面，最后在氟化锂晶体另一面蒸镀剩余反射率低于1%的增透膜，最终获得高质量的铝/氟化锂复合双台阶靶。采用NT1100白光干涉仪、电子比重计、电子能谱、X射线衍射仪、扫描电镜等设备对靶参数进行测量，研究各工艺对靶参数的影响。
- 激光 ,
- 铝 ,
- 氟化锂 ,
- 金刚石车削 ,
- 电子束蒸发 ,
- 增透膜
Abstract: The fabrication technique for Al/LiF composite dual-step target used in quasi-isentropic compression experiment was described. The two 10 μm high steps were processed by diamond turning technology in the surface of the 1.5 mm LiF crystal. The high-density Al film with dozens of micron thickness was coated by electron beam evaporation, and turned into a flat aluminized surface through the diamond turning process. A high-quality Al/LiF composite dualstep target was eventually completed with an evaporated antireflection film (the residual reflectivity was less than 1%) on the other side of the LiF crystal. The target parameters were measured by NT1100 white light interferometer, electron densimeter, electron spectroscopy, XRD and SEM for sensitivity analysis.
- laser ,
- Al ,
- LiF ,
- diamond turning ,
- electron beam evaporation ,
- antireflection film

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参考文献(15)

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激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的研制

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Fabrication of Al/LiF Composite Dual-step Target Used in Quasi-isentropic Compression Experiment by Laser Loading

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