Abstract:
A method for calibrating the static characteristic of wire position sensor (WPS) was described in this paper. The static characteristic calibration system consisting of laser displacement sensor and adjustment platform in horizontal and vertical directions was constructed, and static characteristic research of WPS could be done in two directions. In measurement range of WPS, continuous displacement of 0.1 mm was done to obtain the output data from WPS. The sensitivity and root mean square error of WPS were obtained through fitting and analyzing input and output data. Changing the displacement into 5, 2 and 1 μm, the resolution could be obtained from the change of output. The results show that in vertical direction, sensitivity
KV is not less than -1.005 02, root mean square error is 0.002 4 mm, and the resolution reaches 2 μm; in horizontal direction, sensitivity
KH is not less than -1.001 55, root mean square error is 0.002 1 mm, and the resolution also reaches 2 μm. For WPS, sensitivity, root mean square error and resolution all reach the requirement of detection accuracy.