Abstract: In order to verify the feasibility of integrating isotope source and transduction device, Ti/Pd/Ag composite electrodes applied for solar cell batteries were used for reference, and the optimized Ti/Pd/Au composite electrodes were designed and filled by tritium. Ti/Pd/Au composite electrodes were prepared on the surface of N silicon wafer. Deuterium was loaded into the electrodes to simulate and study the behaviors of tritium in the electrodes. The methods of XRD, SEM and four point probes were used to study the performance changes of the composite electrodes in tritium-storage, micro-structure and conductivity. Ti/Pd/Au composite electrodes can adsorb deuterium and form TiD_x(x≤2), which means that the electrodes can be used as isotope source. TiSi₂ was formed between Ti film and Si substrate due to alloying action, which is helpful to increase adhesion strength and reduce contact resistance between the electrodes and the substrate. Surface resistivity of the composite electrodes (about 10^-4 Ω•cm) can basically meet the conductive requirement. It is a feasible project that the Ti/Pd/Au composite electrodes are applied for betavoltaic isotope batteries.