Abstract: In the Shanghai Synchrotron Radiation Facility hard X-ray micro-focusing beamline station BL15U1, in order to improve the X-ray fluorescence imaging experiment efficiency of the zone plate nano-focusing device, a fast scanning fluorescence imaging experimental device was designed and implemented. The device includes a motion control system, a sample fluorescence detection system and an experimental data synchronization acquisition system. The motion control system was designed with closed-loop feedback control, sample stage motor motion control and scanning trajectory to achieve accurate positioning of samples during fast scanning. The sample fluorescence detection and experimental data synchronization acquisition systems were designed to realize the hardware synchronous trigger counter to obtain the fluorescence counts, which ensures the accuracy of fluorescence imaging. The experimental results show that the triangular waveform tracking error of the motion control system is less than 20 nm, which satisfies the requirement that the repeatability of the spot at the sample is less than 1/10 of the spot size. The element distribution image of the standard copper mesh is obtained by the system, and the image acquisition time is 1/5 of that in the “step-by-step” scanning mode, which confirms the feasibility and efficiency of the experimental system.