Abstract: Faraday cup was used to absorb and stop the beam during the two phases of beam commissioning, such as the front end (FE) system and the temporary line after the drift tube linac (DTL) at the Chinese Spallation Neutron Source (CSNS). According to the beam physical parameters, graphite was selected to stop the beam directly and oxygen-free copper, which was just behind the graphite, as the thermal conductive material. Through the analysis and comparison of the target type and cooling efficiency, the single slant target was determined. The inclination angle of the target surface to the beam was set to 10°, meanwhile a new waterfall type water-cooled structure with parallel tunnels was designed to improve the cooling efficiency. The finite element software ANSYS was used for thermal analysis of the model, by which the diameter and space of water-cooled tunnel were optimized. Structure analysis and stress deformation were checked to ensure the reliability of the manufacturing. With the Faraday cup discussed in this paper, the beam commissioning went well.