测量二次电子空间分布特征矩阵法的有效性分析

Validity Analysis of Spatial Distribution Measurement of Secondary Electron by Solving Eigenmatrix Method

摘要: 为了准确测量不同材料在实际环境中的二次电子空间分布，设计了一种新型的二次电子发射空间分布测量结构，给出了实验测量原理，用求解特征矩阵的方法对实验结果进行处理，得到了所需的二次电子空间分布。通过模拟计算对该测量方法进行了校验，模拟结果与假设二次电子空间分布函数相吻合，表明该测量方法可靠、测量精度高，为后续样机研制奠定了理论基础。

Abstract: In order to measure the secondary electron spatial distribution of different materials in the actual environment accurately, a new type of secondary electron emission spatial distribution measurement structure was designed. The experimental measurement principle was given, and the measured data were analyzed by solving the eigenmatrix method to obtain the required secondary electron spatial distribution. The validity of proposed measurement method by simulation calculation was verified, and the simulation result was consistent with the assumed secondary electron spatial distribution function. It indicates that the measurement method is reliable and accurate. The prototype of measurement system will be developed based on this new design.