Abstract: A new type of diamond-like carbon (DLC) resistive electrode for micro-pattern gas detector (MPGD) was developed by magnetron sputtering. A variety of factors affecting DLC surface resistivity were studied systematically, including target current, vacuum degree and element doping. Also the bonding strength and internal stress of DLC resistive electrodes were adjusted and optimized. The results show that the surface resistivity decreases as the target current increases. The higher the vacuum degree, the smaller the surface resistivity of DLC resistive electrode and the better the stability. The doping of hydrogen and nitrogen can increase the surface resistivity and the influence of hydrogen is greater. This method lays a technical foundation for the development and performance improvement of new detector.