10 cm×10 cm Bulk Micromegas探测器的研制

Research and Development of 10 cm×10 cm Bulk Micromegas Detector

摘要: Bulk Micromegas探测器是一种新型微结构气体探测器。利用光蚀刻技术制作了有效面积为10 cm×10 cm的多通道Bulk Micromegas探测器。对探测器的各通道进行了电容测试，显示探测器具有较好的均匀性。在Ar+10%CO₂气体中，使用⁵⁵Fe放射源和自主研制的基于APV25前端卡的数字化电子学，对制作的有效面积为10 cm×10 cm的探测器进行了测试，其结果显示探测器性能良好，能得到清晰的二维事件分布图。该探测器目前全部工艺国产化，并能进行批量生产，成品率接近100%。

Abstract: Bulk Micromegas detector is a new type of microstructure gas detector. A multi-channel Bulk Micromegas detector with an effective area of 10 cm×10 cm was fabricated by using photolithography. Capacitance tests were performed on each channel of the detector, showing good uniformity of the detector. The detector with an effective area of 10 cm × 10 cm was tested in the gas of Ar+10%CO₂, using ⁵⁵Fe radioactive source and digital electronics based on APV25 front-end card independently. The detector achieved good performance, obtaining a clear two-dimensional event distribution map. At present, all the processes of this detector can be made locally in China and can be mass-produced, and the yield rate is close to 100%.