RBS法测量重元素衬底上轻元素薄靶厚度的方法研究

Thickness Measurement of Light Element Thin Target on Heavy Element Substrate with RBS Method

  • 摘要: 在核反应实验中,靶厚的精度往往会直接影响实验结果的可靠性。为精确测量重元素衬底上轻元素薄靶的厚度,本文通过卢瑟福背散射(RBS)法,使用能量1.5 MeV的质子束对蒸镀在300 μm厚181Ta衬底上薄74Ge靶的厚度进行了测量。RBS法测量结果与称重法相差较小,但信噪比从1∶2 000提升到1∶12,靶厚相对不确定度由10%减少到5%左右。同时采用SIMNRA软件对测量结果进行了模拟验证,模拟能谱与实验能谱符合较好。通过RBS法测量重元素衬底上轻元素薄靶的厚度,尤其当重元素衬底的质量远大于靶物质时,可有效提高测量结果的信噪比及不确定度,为核反应实验的分析提供了较好的依据。

     

    Abstract: The accuracy of target thickness has a great influence on the reliability of the result in nuclear reaction experiment. In order to measure the thickness of light element thin target on the heavy element substrate, a 1.5 MeV proton beam was used to measure a thin 74Ge target evaporated on a 181Ta substrate which has a thickness of 300 μm with Rutherford backscattering (RBS) method. The difference of measurement result between RBS method and weighing method is small, but the signal-noise-ratio increases from 1∶2 000 to 1∶12 and the thickness relative uncertainty decreases from 10% to about 5% compared with weighing method. SIMNRA simulation was also performed to check the measurement result, which matches well with experiment energy spectrum. RBS method can effectively improve the signal-noise-ratio and uncertainty when measuring the thickness of light element thin target on a heavy element substrate, especially when the substrate is much heavier than the target, which provides a good basis for the data analysis in nuclear reaction experiment.

     

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