Abstract: The rate theory is a kind of important method to simulate long-time irradiation damage. Its computational difficulty lies in the numerical solution of the rate theory (RT) equations for large-scale. The master equation of rate theory is hard to solve directly because of the stiffness of the RT equations. In this paper, the exponential time difference method was used to solve the RT equations parallelly. The implementation of the exponential time difference method was given in the simulation of thermal aging-induced cavity evolution type and irradiation-induced dislocation loop evolution, respectively. The results confirm the feasibility of the exponential time difference method for solving the large-scale RT equations parallelly, which helps to implement the efficient simulation of the long-time evolution behavior of irradiation-induced material microstructures.