抗辐射加固高压NMOS器件的单粒子烧毁效应研究

Single-event Burnout Effect on Radiation-hardened High-voltage NMOS

  • 摘要: 由于施加高栅极工作电压,使得器件容易发生重离子辐射损伤效应,其中,重大的重离子辐射损伤效应是单粒子栅穿效应(SEGR)和单粒子烧毁效应(SEB)。本文介绍了抗辐射加固高压SOI NMOS器件的单粒子烧毁效应。基于抗辐射加固版图和p型离子注入工艺,对高压器件进行抗辐射加固,提高器件的抗单粒子烧毁能力,并根据电路中器件的电特性规范,设计和选择关键器件参数。通过仿真和实验结果研究了单粒子烧毁效应。实验结果表明,抗辐射加固器件在单粒子辐照情况下,实现了24 V的高漏极工作电压,线性能量传输(LET)阈值为83.5 MeV·cm2/mg。

     

    Abstract: Single-event gate rupture (SEGR) and single-event burnout (SEB) are the significant radiation threats from heavy ions due to the high applied gate voltage. The singleevent burnout effect on radiationhardened highvoltage SOI NMOS was reported. The hardened layout and ptype ion implantation process were developed to enhance the hardened structure against SEB effect, and the critical device parameters were designed and chosen according to electrical specifications. The SEB effect was studied in detail based on both simulated and experimental results. The experiment data demonstrate that the radiationhardened device achieves a high drain voltage of 24 V under singleevent irradiation with a linear energy transfer (LET) threshold value of 83.5 MeV·cm2/mg.

     

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