Abstract: Boiling is a typical phenomenon in the field of heat and mass transfer, which has important influence on industrial safety and energy efficiency. However, boiling phenomenon is extremely complex and it is difficult to describe its mechanism. High-precision experimental measurement is the key to obtain boiling mechanism in order to obtain accurate growth model. Based on the accurate measurement, an accurate mathematical model can be established to provide support for the development of wall boiling model. In this study, the transparent ITO film was utilized as the heating material, laser interferometry and high-speed camera were used to measure the growth process of single bubble in subcooled pool boiling synchronically. The structure and change process of the microlayer at the bottom of the bubble and other related parameters were obtained by laser interferometry. Macro parameters of bubble such as growth time，waiting time and shape evolution were obtained by the side camera. The bubble dynamics during the growth process can be obtained by comparing the side and bottom images. The result shows that the bubble growth process can be divided into two stages: bubble growth period and bubble departure period. During the growth period, there exists a microlayer at the bottom of bubble and it expands rapidly. The evaporation of microlayer provides energy for bubble growth and keeps the volume of bubble growing. At this time, the shape of bubble is hemispherical. When the microlayer evaporates, the bubble enters the departure period. At this stage, the volume of the bubble is still growing because the surrounding superheat layer is providing energy to the bubble. The shape gradually transits from hemispherical to spherical, and finally develops into inverted water drop type. The time of the two periods is approximately equal. Quantitative analysis of relevant parameters shows that the thickness of microlayer increases with the increase of radius. The maximum thickness of microlayer increases first and then decreases with the growth of bubbles. It is because that the bubble expands faster in the early stage. In this period, both dry spot diameter and contact diameter increased simultaneously. In the departure period, contact diameter gradually decreases. When the bubble is stable, the ratio of contact diameter to bubble diameter is about 0.6. At the same time, it is also observed in the experiment that when entering the later stage of microlayer evaporation, the shape of the microlayer is no longer a standard Newton ring. The deformation of the interference fringe indicates that the edge of the microlayer is bent.