重离子引起SiC MOSFET栅氧化物潜在损伤研究
Latent Gate Oxide Damage in SiC MOSFET Induced by Heavy Ions
-
摘要: 针对空间应用,开展SiC MOSFET单粒子效应试验研究。在加速器上用重离子辐照1 200 V SiC MOSFET,离子线性能量传输(LET)在0.26~118 MeV·cm2/mg之间,辐照中被试器件加50~600 V静态漏源偏置电压、栅源短接,实时测量电特性,进行辐照后栅应力(PIGS)测试。试验结果发现,50~100 V偏置电压下,离子引起瞬态电流,PIGS测试栅失效。分析认为离子引起栅氧化物潜在损伤,PIGS测试过程中,潜在损伤进一步退化导致栅失效。氧化物潜在损伤不仅与辐照偏置电压有关,还与入射离子LET和注量有关。PIGS测试需要的栅应力时间与潜在损伤程度有关,可超过300 s。并给出了电荷累积损伤模型。模型进行SiC MOSFET单粒子效应评估时,应考虑离子引起栅氧化物潜在损伤的影响,需根据轨道和任务周期确定试验离子注量,根据应用情况确定辐照偏置电压,并评估确定PIGS测试栅应力时间。Abstract: The single event effect on SiC MOSFET was studied for space applications. 1 200 V SiC MOSFET from four manufactures was irradiated with heavy ions. The ions of carbon (C), germanium (Ge), tantalum (Ta), bismuth (Bi), and uranium (U) were used. The linear energy transfer (LET) of ions was 0.26-118 MeV·cm2/mg. The static drain-source bias voltage of 50-600 V was applied on the devices under test and the electrical characteristics were measured during irradiation. The post irradiation gate stress (PIGS) test was performed. The experiment results show that single event transient current (SETC) is induced by heavy ions at 50-100 V bias voltage, single event leakage current (SELC) is induced by heavy ions at 200 V bias voltage, and single event burnout is induced by heavy ions at 200-600 V bias voltage. The experiment results confirm that the gate oxide of SiC MOSFET is the most sensitive to single event effect. Biased at about 5% of the rated breakdown voltage, the latent gate oxide damage may be induced by heavy ions. The latent gate oxide damage may further degrade to lead the gate failure during PIGS test. The latent gate oxide damage is the function of incident ion LET and bias voltage, as well as ion fluence, which is a cumulative effect. Dependent on the severity of latent gate oxide damage, the gate stress time to trigger gate failure may exceed 300 s. The mechanism of accumulate charge damage was proposed. The electric field in the gate oxide layer increases due to charges generated by the incident ions at different locations. The accumulate damage of gate oxide is caused. It is necessary to evaluate the effect of latent gate oxide damage induced by heavy ions in SiC MOSFETs for single event effect test for space application, the ion fluence used should be calculated based on the orbit and mission period, and the appropriate gate stress time should be evaluated for PIGS test.
-
-
[1] 曹宇翔,张潇,王少宁,等. 碳化硅功率器件在宇航电源中的研究与应用[J]. 电子设计工程,2023,31(9):7-12 CAO Yuxiang, ZHANG Xiao, WANG Shao-ning, et al. Research and application of silicon carbide power devices in aerospace power supply[J]. Electronic Design Engineering, 2023, 31(9): 7-12(in Chinese).
[2] 侯欣宾,王立,李庆民,等. 空间太阳能电站高压大功率电力传输关键技术综述[J]. 电工技术学报,2018,33(14):3385-3395. HOU Xinbin, WANG Li, LI Qingmin, et al. Review of key technologies for high-voltage and high-power transmission in space solar power station[J]. Transactions of China Electrotechnical Society, 2018, 33(14): 3385-3395(in Chinese).
[3] 张宝林,唐林江,陈滔,等. 第三代宽禁带半导体(SiC)器件在空间太阳能电站中的应用及进展[J]. 空间电子技术,2018,15(2):94-100. ZHANG Baolin, TANG Linjiang, CHEN Tao, et al. Application of third generation wide-gap semiconductor (SiC) devices in space solar power station[J]. Space Electronic Technology, 2018, 15(2): 94-100(in Chinese).
[4] MARTINELLA C, ZIEMANN T, STARK R, et al. Heavy-ion microbeam studies of single-event leakage current mechanism in SiC VD-MOSFETs[J]. IEEE Transactions on Nuclear Science, 2020, 67(7): 1381-1389. [5] MARTINELLA C, NATZKE P, ALIA R G, et al. Heavy-ion induced single event effects and latent damages in SiC power MOSFETs[J]. Microelectronics Reliability, 2022, 128: 114423. [6] ZHOU X, PANG H, JIA Y, et al. Gate oxide damage of SiC MOSFETs induced by heavy-ion strike[J]. IEEE Transactions on Electron Devices, 2021, 68(8): 4010-4015. [7] JOHNSON R A, WITULSHI A F, BALL D R, et al. Analysis of heavy-ion-induced leakage current in SiC power devices[J]. IEEE Transactions on Nuclear Science, 2022, 69(3): 248-253. [8] MARTINELLA C, STARK R, ZIEMANN T, et al. Current transport mechanism for heavy-ion degraded SiC MOSFETs[J]. IEEE Transactions on Nuclear Science, 2019, 66(7): 1702-1709. [9] LIANG X, ZHAO J, ZHENG Q, et al. Impact of heavy-ion irradiation on gate oxide reliability of silicon carbide power MOSFET[J]. Radiation Effects and Defects in Solids, 2021, 176(11-12): 1038-1048. [10] MCPHERSON J A, HITCHCOCK C W, CHOW T P, et al. Ion-induced mesoplasma formation and thermal destruction in 4H-SiC power MOSFET devices[J]. IEEE Transactions on Nuclear Science, 2021, 68(5): 651-658. [11] BUSATTO G, PASQUALE A D, MARCIANO D, et al. Physical mechanisms for gate damage induced by heavy ions in SiC power MOSFET[J]. Microelectronics Reliability, 2020, 114: 113903. [12] YAN X Y, HE Z, CHEN Q Y, et al. An investigation of angle effect on heavy ion induced single event effect in SiC MOSFET[J]. Microelectronics Reliability, 2022, 138: 114696. [13] PENG C, LEI Z, ZHANG Z, et al. Influence of drain bias and flux on heavy ion-induced leakage currents in SiC power MOSFETs[J]. IEEE Transactions on Nuclear Science, 2022, 69(5): 1037-1043. [14] ABBATE C, BUSATTO G, TEDESCO D, et al. Gate damages induced in SiC power MOSFETs during heavy-ion irradiation—Part Ⅰ[J]. IEEE Transactions on Electron Devices, 2019, 66(10): 4235-4242. [15] LIU Y, WANG Y, YU C, et al. Effect of P+ shielding region on single event burnout of 4H-SiC trench gate MOSFET[J]. Superlattices and Microstructures, 2018, 122: 165-170. [16] ZHANG H, GUO H, LEI Z, et al. Experiment and simulation on degradation and burnout mechanisms of SiC MOSFET under heavy ion irradiation[J]. Chinese Physics B, 2023, 32(2): 028504. [17] PENG C, LEI Z, CHEN Z, et al. Experimental and simulation studies of radiation-induced single event burnout in SiC-based power MOSFETs[J]. IET Power Electron, 2021, 14(9): 1700-1712. [18] ROBERT A J, WITULSKI A F, SIERAWSKI B D, et al. Influence of radiation environment variability on cumulative heavy-ion-induced leakage current in SiC power devices[J]. IEEE Transactions on Nuclear Science, 2023, 70(4): 322-327. [19] MIL-STD-750 method 1080.1single-event burnout and single-event gate rupture[S]. [S. l.]: [s. n.], 2012.
计量
- 文章访问数: 123
- HTML全文浏览量: 2
- PDF下载量: 66